SemiFlows MCP Server
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SemiFlows Open Process Catalog & MCP Server (40nm – 7nm)
Open bilingual (English & Chinese) semiconductor process engineering article index (395 technical deep-dives), foundational concept definitions, technology node scaling comparisons (40nm BSI CIS, 28nm Planar HKMG, 14nm FinFET, 7nm FinFET), and a zero-dependency Model Context Protocol (MCP) server for AI engineering assistants.
1. What Is Included
File | Description |
| Structured JSON containing 4 technology node overviews, 21 foundational FEOL/MOL/BEOL/Lithography concepts, 3 node-to-node scaling comparisons, and 395 bilingual semiconductor engineering article summaries. |
| Flat CSV index of 395 bilingual semiconductor process articles ( |
| Flat CSV table comparing 40nm vs 28nm, 28nm vs 14nm, and 14nm vs 7nm across transistor architecture, lithography, strain engineering, and interconnect scaling. |
| Standalone Node.js stdio MCP server providing |
Related MCP server: openclaw-brain
2. Interactive 2.5D Process Flows
Complete step-by-step process sequences and interactive 2.5D cross-sections are hosted on SemiFlows:
40nm BSI CMOS Image Sensor — Deep photodiode implants, recessed transfer gate, dual-damascene Cu interconnects, wafer bonding & backside thinning (Free Full Flow)
28nm Planar HKMG CMOS — Gate-Last Replacement Metal Gate (RMG), ALD HfO2 high-k dielectric, embedded SiGe pMOS strain, ULK Cu BEOL
14nm 3D FinFET CMOS — SADP sub-wavelength silicon fins, FCVD STI oxide fill, 3D tri-gate RMG, Self-Aligned Contact (SAC)
7nm Advanced FinFET CMOS — SAQP fin pitch scaling, Single Diffusion Break (SDB), multi-Vt ALD work-function engineering, Cobalt MOL/M0 local routing
Node-to-Node Generation Comparisons
40nm vs 28nm: Polysilicon Gate to Gate-Last HKMG & Strain Engineering
28nm vs 14nm: Planar MOSFET to 3D FinFET, SADP & Self-Aligned Contacts
14nm vs 7nm: SADP to SAQP, Single Diffusion Break & Cobalt Middle-of-Line
3. Quick Start: SemiFlows MCP Server (Claude Desktop / Cursor)
Add the following entry to your claude_desktop_config.json or Cursor MCP settings:
{
"mcpServers": {
"semiflows": {
"command": "node",
"args": ["/path/to/semiflows-open-catalog/mcp/index.mjs"]
}
}
}Available MCP Tools
search_articles— Search 395+ bilingual semiconductor process articles (HKMG,FinFET,CMP,SADP,EUV,Cobalt,Silicide,STI) with summaries and direct links.lookup_concept— Search foundational semiconductor process concepts (STI,HKMG,FinFET,SADP,SAC,CMP,Damascene) with bilingual explanations and interactive walkthrough links.compare_nodes— Retrieve structured engineering trade-offs between adjacent technology nodes (40nm-vs-28nm,28nm-vs-14nm,14nm-vs-7nm).explore_nodes— Inspect high-level device architectures and technology node overviews across 40nm, 28nm, 14nm, and 7nm.
4. Citation & License
Dataset (
dataset/*): Licensed under Creative Commons Attribution 4.0 International (CC BY 4.0). Any derivative work, RAG index, or benchmark must credit SemiFlows (https://semiflows.com).MCP Server Code (
mcp/*): Licensed under the MIT License.
This server cannot be deployed
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