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josephzsemi

SemiFlows MCP Server

by josephzsemi

SemiFlows Open Process Catalog & MCP Server (40nm – 7nm)

Website Node Comparisons License: CC BY 4.0

Open bilingual (English & Chinese) semiconductor process engineering article index (395 technical deep-dives), foundational concept definitions, technology node scaling comparisons (40nm BSI CIS, 28nm Planar HKMG, 14nm FinFET, 7nm FinFET), and a zero-dependency Model Context Protocol (MCP) server for AI engineering assistants.


1. What Is Included

File

Description

dataset/semiflows-public-catalog.json

Structured JSON containing 4 technology node overviews, 21 foundational FEOL/MOL/BEOL/Lithography concepts, 3 node-to-node scaling comparisons, and 395 bilingual semiconductor engineering article summaries.

dataset/semiflows-articles.csv

Flat CSV index of 395 bilingual semiconductor process articles (slug, category, primary_keyword, title_en, title_zh, excerpt_en, excerpt_zh, url_en, url_zh).

dataset/semiflows-comparisons.csv

Flat CSV table comparing 40nm vs 28nm, 28nm vs 14nm, and 14nm vs 7nm across transistor architecture, lithography, strain engineering, and interconnect scaling.

mcp/index.mjs

Standalone Node.js stdio MCP server providing search_articles, lookup_concept, compare_nodes, and explore_nodes tools with direct citation links to interactive 2.5D cross-sections on SemiFlows.


Related MCP server: openclaw-brain

2. Interactive 2.5D Process Flows

Complete step-by-step process sequences and interactive 2.5D cross-sections are hosted on SemiFlows:

  • 40nm BSI CMOS Image Sensor — Deep photodiode implants, recessed transfer gate, dual-damascene Cu interconnects, wafer bonding & backside thinning (Free Full Flow)

  • 28nm Planar HKMG CMOS — Gate-Last Replacement Metal Gate (RMG), ALD HfO2 high-k dielectric, embedded SiGe pMOS strain, ULK Cu BEOL

  • 14nm 3D FinFET CMOS — SADP sub-wavelength silicon fins, FCVD STI oxide fill, 3D tri-gate RMG, Self-Aligned Contact (SAC)

  • 7nm Advanced FinFET CMOS — SAQP fin pitch scaling, Single Diffusion Break (SDB), multi-Vt ALD work-function engineering, Cobalt MOL/M0 local routing

Node-to-Node Generation Comparisons


3. Quick Start: SemiFlows MCP Server (Claude Desktop / Cursor)

Add the following entry to your claude_desktop_config.json or Cursor MCP settings:

{
  "mcpServers": {
    "semiflows": {
      "command": "node",
      "args": ["/path/to/semiflows-open-catalog/mcp/index.mjs"]
    }
  }
}

Available MCP Tools

  1. search_articles — Search 395+ bilingual semiconductor process articles (HKMG, FinFET, CMP, SADP, EUV, Cobalt, Silicide, STI) with summaries and direct links.

  2. lookup_concept — Search foundational semiconductor process concepts (STI, HKMG, FinFET, SADP, SAC, CMP, Damascene) with bilingual explanations and interactive walkthrough links.

  3. compare_nodes — Retrieve structured engineering trade-offs between adjacent technology nodes (40nm-vs-28nm, 28nm-vs-14nm, 14nm-vs-7nm).

  4. explore_nodes — Inspect high-level device architectures and technology node overviews across 40nm, 28nm, 14nm, and 7nm.


4. Citation & License

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